Thin films of chalcogenide materials with a phase transition are used in photonics, non-volatile memory, and neuromorphic computing. Differential scanning calorimetry (DSC) is one of the main methods for studying the chalcogenide materials thermal properties. However, the common sample preparation utilizing materials in powder form does not provide results suitable to define processes on thin films correctly. A sample preparation method for DSC thin-film samples measurements was proposed in this work. A comparison of the results obtained by the traditional and proposed method including the temperature dependence of thin films resistance showed the following results. The crystallization temperature values gained by the suggested method have been close to the values obtained in the resistance temperature dependence test. Thus the method provides higher accuracy.
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Key words:
thin films, chalcogenides, differential scanning calorimetry, phase change materials
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Brief reports
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the work has been supported by the Russian Science Foundation (grant no. 20-79-10322, https://rscf.ru/project/20-79-10322/).
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Babich A. V., Golubeva D. A., Gneushev D. A., Lazarenko P. I., Kolobov A. V., Sherchenkov A. A. Development of a sample preparation technique for measuring thin-film materials thermal properties by differential scanning calorimetry. Izv. vuzov. Elektronika = Proc. Univ. Electronics. 2026;31(3):372–376. (In Russ.). DOI: 10.24151/1561-5405-2026-31-3-372-376.PETMNU
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